| Boron Trifluoride - ( BF3 ) | |||
| Description | |||
| Boron Trifluoride is a colorless , corrosive, nonflammable toxic gas with a pungent, suffocating odor. It forms dense fumes in humid air. Boron Trifluoride is irritating to the mucous membranes. It is soluble in water where it decomposes to form fluoroboric acids .It hydrolyses in moist air . Boron Trifluoride is shipped as a high pressure compressed gas . | |||
| Specifications | |||
| Purity , % | 99.5 | 99.995 | |
| Oxygen + Nitrogen + Argon | ≤10 ppmv | ||
| Carbon Dioxide | ≤ 10 ppmv | ||
| Innert Gas ( Oxygen + Nitrogen + Carbon Dioxide ) | ≤ 4000 ppm | ||
| Sulfur Dioxide | ≤ 20 ppm | ≤ 10 ppmv | |
| Silicon Tetrafluoride | ≤ 300 ppm | ≤3 ppmv | |
| Water | ≤ 0.3 % | ||
| Ship | |||
| DOT Shipping Name | Boron Trifluoride , Compressed | ||
| DOT Classification | 2.3 | ||
| DOT Label | Poison Gas / InHalation Hazard | ||
| UN Number | UN1008 | ||
| CAS No. | 7637-07-2 | ||
| CGA/DISS/JIS/DIN477 | 330/642/W22-14L/NO.8 | ||
| Shipped as | Compressed Gas | ||
| Technical Information | |||
| Cylinder State @ 21.1°C | Gas | ||
| Flammable Limits In Air | Non-flammable | ||
| Auto Ignition Temperature (°C ) | - | ||
| Molecular Weight (g/mol) | 67.805 | ||
| Specific gravity (air =1) | 2.32 | ||
| Critical Temperature ( °C ) | -12.25 | ||
| Critical Pressure ( psig ) | 708.32 | ||
| Applications | |||
| · In semiconductor fabrication, boron trifluoride is used for p-type diffusion in silicon. · In ion implantation. | |||
